2/6/2011	2:59:49 AM	Recipe started at 2:59 AM
2/6/2011	2:59:49 AM	Helium valve closed
2/6/2011	2:59:49 AM	BCl3 valve closed
2/6/2011	2:59:49 AM	PH3 valve closed
2/6/2011	2:59:49 AM	SiCl4 pre valve closed
2/6/2011	2:59:49 AM	SiCl4 post valve closed
2/6/2011	2:59:49 AM	Main Vac valve closed
2/6/2011	2:59:49 AM	Bypass valve closed
2/6/2011	2:59:49 AM	Bubbler valve closed
2/6/2011	2:59:49 AM	H2 valve opened
2/6/2011	2:59:49 AM	Helium MFC set to  0.000000
2/6/2011	2:59:49 AM	H2 MFC set to  500.000000
2/6/2011	2:59:49 AM	BCl3 MFC set to  0.000000
2/6/2011	2:59:49 AM	PHl3 MFC set to  0.000000
2/6/2011	2:59:49 AM	SiCl4 MFC set to  0.000000
2/6/2011	2:59:49 AM	Bypass solenoid MFC set to  0.000000
2/6/2011	2:59:50 AM	Tube furnace set to 0
2/6/2011	3:01:07 AM	Helium valve closed
2/6/2011	3:01:07 AM	BCl3 valve closed
2/6/2011	3:01:07 AM	PH3 valve closed
2/6/2011	3:01:07 AM	SiCl4 pre valve closed
2/6/2011	3:01:07 AM	SiCl4 post valve closed
2/6/2011	3:01:07 AM	Main Vac valve closed
2/6/2011	3:01:07 AM	Bypass valve closed
2/6/2011	3:01:07 AM	H2 valve opened
2/6/2011	3:01:07 AM	Bubbler valve opened
2/6/2011	3:01:07 AM	Helium MFC set to  0.000000
2/6/2011	3:01:07 AM	H2 MFC set to  500.000000
2/6/2011	3:01:07 AM	BCl3 MFC set to  0.000000
2/6/2011	3:01:07 AM	PHl3 MFC set to  0.000000
2/6/2011	3:01:07 AM	SiCl4 MFC set to  0.000000
2/6/2011	3:01:07 AM	Bypass solenoid MFC set to  0.000000
2/6/2011	3:01:07 AM	Tube furnace set to 1000
2/6/2011	3:21:07 AM	Helium valve closed
2/6/2011	3:21:07 AM	PH3 valve closed
2/6/2011	3:21:07 AM	Main Vac valve closed
2/6/2011	3:21:07 AM	Bypass valve closed
2/6/2011	3:21:07 AM	H2 valve opened
2/6/2011	3:21:07 AM	BCl3 valve opened
2/6/2011	3:21:07 AM	SiCl4 pre valve opened
2/6/2011	3:21:07 AM	SiCl4 post valve opened
2/6/2011	3:21:07 AM	Bubbler valve opened
2/6/2011	3:21:07 AM	Helium MFC set to  0.000000
2/6/2011	3:21:07 AM	H2 MFC set to  500.000000
2/6/2011	3:21:07 AM	BCl3 MFC set to  3.000000
2/6/2011	3:21:07 AM	PHl3 MFC set to  0.000000
2/6/2011	3:21:07 AM	SiCl4 MFC set to  50.000000
2/6/2011	3:21:07 AM	Bypass solenoid MFC set to  0.000000
2/6/2011	3:21:07 AM	Tube furnace set to 1000
2/6/2011	3:36:07 AM	H2 valve closed
2/6/2011	3:36:07 AM	BCl3 valve closed
2/6/2011	3:36:07 AM	PH3 valve closed
2/6/2011	3:36:07 AM	SiCl4 pre valve closed
2/6/2011	3:36:07 AM	SiCl4 post valve closed
2/6/2011	3:36:07 AM	Main Vac valve closed
2/6/2011	3:36:07 AM	Bypass valve closed
2/6/2011	3:36:07 AM	Helium valve opened
2/6/2011	3:36:07 AM	Bubbler valve opened
2/6/2011	3:36:07 AM	Helium MFC set to  500.000000
2/6/2011	3:36:07 AM	H2 MFC set to  0.000000
2/6/2011	3:36:07 AM	BCl3 MFC set to  0.000000
2/6/2011	3:36:07 AM	PHl3 MFC set to  0.000000
2/6/2011	3:36:07 AM	SiCl4 MFC set to  0.000000
2/6/2011	3:36:07 AM	Bypass solenoid MFC set to  0.000000
2/6/2011	3:36:07 AM	Tube furnace set to 0
2/6/2011	3:56:07 AM	Helium valve closed
2/6/2011	3:56:07 AM	H2 valve closed
2/6/2011	3:56:07 AM	BCl3 valve closed
2/6/2011	3:56:07 AM	PH3 valve closed
2/6/2011	3:56:07 AM	SiCl4 pre valve closed
2/6/2011	3:56:07 AM	SiCl4 post valve closed
2/6/2011	3:56:07 AM	Main Vac valve closed
2/6/2011	3:56:07 AM	Bypass valve closed
2/6/2011	3:56:07 AM	Bubbler valve closed
2/6/2011	3:56:07 AM	Helium MFC set to  0.000000
2/6/2011	3:56:07 AM	H2 MFC set to  0.000000
2/6/2011	3:56:07 AM	BCl3 MFC set to  0.000000
2/6/2011	3:56:07 AM	PHl3 MFC set to  0.000000
2/6/2011	3:56:07 AM	SiCl4 MFC set to  0.000000
2/6/2011	3:56:07 AM	Bypass solenoid MFC set to  0.000000
2/6/2011	3:56:07 AM	Tube furnace set to 0
2/6/2011	3:56:08 AM	Run finished at 3:56 AM
2/6/2011	4:02:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/6/2011	4:02:09 AM	Recipe started at 4:02 AM
2/6/2011	4:02:09 AM	Helium valve closed
2/6/2011	4:02:09 AM	H2 valve closed
2/6/2011	4:02:09 AM	BCl3 valve closed
2/6/2011	4:02:09 AM	PH3 valve closed
2/6/2011	4:02:09 AM	SiCl4 pre valve closed
2/6/2011	4:02:09 AM	SiCl4 post valve closed
2/6/2011	4:02:09 AM	Main Vac valve closed
2/6/2011	4:02:09 AM	Bubbler valve closed
2/6/2011	4:02:09 AM	Bypass valve opened
2/6/2011	4:02:09 AM	Helium MFC set to  0.000000
2/6/2011	4:02:09 AM	H2 MFC set to  0.000000
2/6/2011	4:02:09 AM	BCl3 MFC set to  0.000000
2/6/2011	4:02:09 AM	PHl3 MFC set to  0.000000
2/6/2011	4:02:09 AM	SiCl4 MFC set to  0.000000
2/6/2011	4:02:09 AM	Bypass solenoid MFC set to  0.000000
2/6/2011	4:02:10 AM	Tube furnace set to 0
2/6/2011	4:02:39 AM	Helium valve closed
2/6/2011	4:02:39 AM	H2 valve closed
2/6/2011	4:02:39 AM	BCl3 valve closed
2/6/2011	4:02:39 AM	PH3 valve closed
2/6/2011	4:02:39 AM	SiCl4 pre valve closed
2/6/2011	4:02:39 AM	SiCl4 post valve closed
2/6/2011	4:02:39 AM	Bubbler valve closed
2/6/2011	4:02:39 AM	Main Vac valve opened
2/6/2011	4:02:39 AM	Bypass valve opened
2/6/2011	4:02:39 AM	Helium MFC set to  0.000000
2/6/2011	4:02:39 AM	H2 MFC set to  0.000000
2/6/2011	4:02:39 AM	BCl3 MFC set to  0.000000
2/6/2011	4:02:39 AM	PHl3 MFC set to  0.000000
2/6/2011	4:02:39 AM	SiCl4 MFC set to  0.000000
2/6/2011	4:02:39 AM	Bypass solenoid MFC set to  0.000000
2/6/2011	4:02:39 AM	Tube furnace set to 0
2/6/2011	4:02:39 AM	Run finished at 4:02 AM
2/6/2011	4:02:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
